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Dektak XT
The New Standard in Stylus Profilometry
The Dektak XT stylus profiler features a revolutionary design that enables unmatched repeatability of under five angstroms (<5) and up to 40% improved scanning speeds.

This major milestone in stylus profiler performance is the culmination of forty years of Dektak brand innovation and industry leadership. The remarkable breakthroughs incorporated in this tenth-generation Dektak system enable the critical nanometer-level film, step and surface measurements that will power future advances in the microelectronics, semiconductor, solar, high-brightness LED, medical, scientific and materials science markets.
Thin Film Inspection — Ensuring High Yield
Close monitoring of deposition and etch rate uniformity, as well as thin film stress, in semiconductor manufacturing can save valuable time and money. Non-uniformity of a film layer or too much stress, can result in poor yield and inferior end product performance. Dektak XT provides the ability to quickly and easily set up and run automated multi-site measurement routines to verify the precise thickness of thin films across the wafer surface, down to the nanometer scale. The unmatched repeatability of the Dektak XT gives engineers the accurate film thickness and stress measurements they need to precisely adjust etch and deposition processes to improve yields.

Surface Roughness Verification — Assuring Performance
The Dektak XT is ideal for routine qualification of surface roughness on precision machined parts for a wide variety of industries, including automotive, aerospace, and medical devices. For example, the roughness of the hydroxyapatite coating on the backside of an orthopedic implant influences its adhesive properties and efficacy once implanted. A quick analysis of the rough surface with a Dektak XT confirms if the desired crystalline growth has been achieved and if the implant will pass production requirements. Using the Vision64 database with pass/fail criteria, quality assurance personnel can easily identify implants for rework or certify implant quality.

Solar Trace Analysis — Reducing Manufacturing Costs
In the solar market, Dektak is established as the preferred solution for measuring the critical dimensions of silver traces (streets), the conductive lines found on mono and poly crystalline solar panels. The height, width, and continuity of the silver traces correlates to a solar cell’s ability to conduct energy. The desired state of production is to apply just enough silver paste for optimum conductivity without wasting expensive silver. The Dektak XT employs a trace analysis routine that reports a street’s critical dimensions to verify that exactly the sufficient material for conductivity is present. The Data Analyzer recipes and automation functions in Vision64 are influential in automating this verification process.

Microfluidics — Verifying Design and Performance
Dektak is the only stylus profiler to measure large vertical features of sensitive materials (up to 1mm tall) with angstrom-level repeatability. Researchers in MEMS and microfluidics industries can rely on Dektak XT for the critical measurements needed to verify their parts are built to specification. The low force measurement capability, NLite+, applies a light touch to sensitive materials to measure vertical steps and roughness accurately without damaging the sample’s surface.
Building on the knowledge and experience from more than forty years of stylus profiling innovations, the Dektak XT incorporates a powerful combination of industry firsts, including a unique single-arch design and smart electronics for unmatched repeatability and performance, HD true color camera for enhanced image resolution and clarity, and a 64-bit parallel processing software architecture.

Unmatched performance and better than 5 repeatability
The Dektak XT features an innovative single-arch design that delivers breakthrough platform stability. This is combined with leading-edge "smart electronics" that establish a new low-noise benchmark for stylus profiling. Finally, the Dektak XT’s new hardware configuration offers 40% shorter collection times than prior generations.

Unprecedented efficiency and ease of use
The Dektak XT is equipped with Bruker’s intuitive Vision64 user interface, which simplifies workflow and operation to make the profiler easier than ever to use for advanced analysis. In addition, the system’s self-aligning styli enables effortless tip exchange, while the profiler’s single sensor design enables the widest range of capabilities in a single platform.

Incomparable value from the world leader in stylus profilers
In addition to premier performance in an affordable package, the Dektak XT is available with the full complement of accessories to extend versatility and tailor the system to your specific application.
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